SVS product
Scientific Value Solutions Corp
MSX 1000
Modular Spin Multiprocess
System overview | |
---|---|
Application | LED, Semiconductor, MEMS Resist Coating/Developing |
Wafer size | 4"/ 6"/ 8" |
Substrate | Si, Sapphire, GaN, GaAs, Glass |
Features | • Convenience GUI environment operation • Onboard Windows-based PC control • Built-in chemical supply system • Faster delivery • Enclosed system |
SVS COMPANY
SVS의 장비를 국내,외 메이저 반도체 칩 제조사들이 도입하여
양산 장비로 운용 함으로써 기술적 우수성과 신뢰성을 인정 받고 있습니다.