SVS product

Scientific Value Solutions Corp

MSX 1000

MSX 1000

Modular Spin Multiprocess

System overview
ApplicationLED, Semiconductor, MEMS
Resist Coating/Developing
Wafer size4"/ 6"/ 8"
SubstrateSi, Sapphire, GaN, GaAs, Glass
Features• Convenience GUI environment operation
• Onboard Windows-based PC control
• Built-in chemical supply system
• Faster delivery
• Enclosed system

MSX 1000R

MSX 1000R

Modular Spin Multiprocess

System overview
ApplicationLED, Semiconductor, MEMS
Resist, PI Coating/Developing
Wafer size6"/ 8"
SubstrateSi, Sapphire, GaN, GaAs, Glass
Features• SECS/GEM communication
• Easy maintenance
• Sophisticated HP
• High reliability
• Optimized software

SVS COMPANY

SVS의 장비를 국내,외 메이저 반도체 칩 제조사들이 도입하여
양산 장비로 운용 함으로써 기술적 우수성과 신뢰성을 인정 받고 있습니다.